Need help debuging semaphores

Hi!

I've been running Apache for a while and been quite happy.

Now apache "suddenly" won't start anymore and gives the error:
[Sat Oct 14 03:18:30 2006] [emerg] (28)No space left on device: Couldn't 
create accept lock

A little googling suggests that it should be related to semaphores - alas 
my ipcs seems to be fine.

After a cold boot I am seeing:

# ipcs -s
IPC status from <running system> as of Sat Oct 14 03:29:33 2006

Semaphores:
T        ID     KEY        MODE       OWNER    GROUP

# ipcs -S
IPC status from <running system> as of Sat Oct 14 03:29:36 2006

seminfo:
         semmap:     30  (# of entries in semaphore map)
         semmni:     10  (# of semaphore identifiers)
         semmns:     60  (# of semaphores in system)
         semmnu:     30  (# of undo structures in system)
         semmsl:     60  (max # of semaphores per id)
         semopm:    100  (max # of operations per semop call)
         semume:     10  (max # of undo entries per process)
         semusz:    100  (size in bytes of undo structure)
         semvmx:  32767  (semaphore maximum value)
         semaem:  16384  (adjust on exit max value)


I am really at a loss and in doubt where too look for debuging. Any hints 
would be _highly_ appreciated.

Kind Regards,
Claus Andersen