current MAKEDEV failed

Hi All,
I tried to install current-hpcarm(NetBSD-daily/HEAD/200604210000Z)
into my jornada728, but MAKEDEV script failed.
I referred to this homepage.
http://wiki.aydogan.net/index.php/How_to_install_NetBSD_on_a_hpcarm
I created/formated the partitions, and extracted the binary sets,
and did MAKEDEV all, but it failed with this error messages.
./MAKEDEV: ttyE0: unknown device
./MAKEDEV: ttyE1: unknown device
./MAKEDEV: ttyE2: unknown device
./MAKEDEV: ttyE3: unknown device
./MAKEDEV: ttyE4: unknown device
./MAKEDEV: ttyE5: unknown device
./MAKEDEV: ttyE6: unknown device
./MAKEDEV: ttyE7: unknown device
./MAKEDEV: wsmouse0: unknown device
./MAKEDEV: wsmouse1: unknown device
./MAKEDEV: wsmouse2: unknown device
./MAKEDEV: wsmouse3: unknown device
./MAKEDEV: wskbd0: unknown device
./MAKEDEV: wskbd1: unknown device
./MAKEDEV: wskbd2: unknown device
./MAKEDEV: wskbd3: unknown device
./MAKEDEV: wsmux0: unknown device
./MAKEDEV: wsmux1: unknown device
./MAKEDEV: wsmux2: unknown device
./MAKEDEV: wsmux3: unknown device
./MAKEDEV: wsmouse: unknown device
./MAKEDEV: wskbd: unknown device
./MAKEDEV: ttyEcfg: unknown device
./MAKEDEV: ttyEstat: unknown device
./MAKEDEV: wsfont: unknown device
./MAKEDEV: fd0: unknown device
./MAKEDEV: fd1: unknown device
./MAKEDEV: wd0: unknown device
./MAKEDEV: wd1: unknown device
./MAKEDEV: wd2: unknown device
./MAKEDEV: wd3: unknown device
./MAKEDEV: sd0: unknown device
./MAKEDEV: sd1: unknown device
./MAKEDEV: sd2: unknown device
./MAKEDEV: sd3: unknown device
......

I use Hitachi 6G microdrive, and host machine is current-i386(same snapshots).
Then, I tried to install 3.0-release-hpcarm, and it succeded in same way.
Any ideas?

Thanks,
Mamoru Ookawa.