MEMS Express from MNX

MEMS News <[email protected]> Thu, 23 May 2019 20:59:26 -0400 (EDT)
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View Mailing Online [url: http://www.memsnet.org/news/mailings/1507/]


MEMS Express is brought to you by MNX [url: http://www.mems-exchange.org]:
your microsystem design and fabrication partner



MEMS technology

Mechanically strengthened graphene-Cu composite with reduced thermal expansion towards interconnect applications
High-density integration technologies with copper (Cu) through-silicon via (TSV) have emerged as viable alternatives for achieving the requisite integration densities for the portable electronics and micro-electro-mechanical systems (MEMSs) package.Nature: 2019-05-19
[url: https://www.nature.com/articles/s41378-019-0059-0]

Cutting the time on early disease diagnoses with extracellular vesicles
The difference is an integrated microfluidics platform developed at Notre Dame that uses extracellular vesicles (EVs) containing microRNAs (miRNAs) as biomarkers for early-stage disease diagnosis.Phys.org: 2019-05-20
[url: https://phys.org/news/2019-05-early-disease-extracellular-vesicles.html]

Measuring ion-pairing and hydration in variable charge supramolecular cages with microwave microfluidics
Metal-organic supramolecular cages can act as charged molecular containers that mediate reactions, mimic enzymatic catalysis, and selectively sequester chemicals. The hydration of these cages plays a crucial role in their interactions with other species.Nature: 2019-05-17
[url: https://www.nature.com/articles/s42004-019-0157-9]

Mems detects THz radiation at room temperature
The University of Tokyo has created a thermo-mechanical micromachine that can sense terahertz electromagnetic radiation, without the need for cryogenic cooling. THz cameras is a possible application. The device is a beam suspended across a gap, coated with ...Electronics Weekly: 2019-05-16
[url: https://www.electronicsweekly.com/news/research-news/mems-detects-thz-radiation-room-temperature-2019-05/]


MEMS business

EV To Show Latest In Heterogeneous Integration In Las Vegas
Company to present on high-vacuum system which provides direct bonding of &#39;anything on anything&#39; at IEEE ECTC EV Group (EVG), a supplier of wafer bonding and lithography equipment for MEMS, nanotechnology and compound semiconductors, will be presenting on ...Compoundsemiconductor.net: 2019-05-21
[url: https://compoundsemiconductor.net/article/107284/EV_to_show_latest_in_heterogeneous_integration_in_Las_Vegas]

Jasper Display, Plessey demonstrate GaN-on-Silicon Monolithic microLED Bonded Displays
Following a continued partnership with JDC including an extensive capital investment in a complete tool set, enabling successful wafer to wafer bonding. Plessey has succeeded in wafer level bonding of its GaN-on-Silicon monolithic microLED wafers with JDC ...ecnmag: 2019-05-16
[url: https://www.ecnmag.com/news/2019/05/jasper-display-plessey-demonstrate-gan-silicon-monolithic-microled-bonded-displays]


Nanotechnology

Understanding Nano !
Scanning probe instruments can&#39;t imagine anything as large as luggage, however; they are more useful for measuring structures on length scales from the single atom level to the micro-scale.MENAFN: 2019-05-23
[url: https://menafn.com/1098559103/Understanding-Nano]

Darpa funds brain-machine interface project for controlling weapons via thoughts
The US Defence Advanced Research Projects Agency (Darpa) has officially funded a programme to develop a brain-to-machine interface – in the form of a headset designed to let military personnel control weapons through brain activity alone. The Next ...IET: 2019-05-23
[url: https://eandt.theiet.org/content/articles/2019/05/darpa-funds-brain-machine-interface-project-for-controlling-weapons-via-thoughts/]

Scientists at DGIST Develop Polariton Nano-Laser Operating at Room Temperature
A room temperature polariton nano-laser has been demonstrated, providing the crucial path of related research such as polariton physics at the nanoscale and also applications in quantum information systems. The research was published in the journal ...ecnmag: 2019-05-21
[url: https://www.ecnmag.com/news/2019/05/scientists-dgist-develop-polariton-nano-laser-operating-room-temperature]

Ultrafast Relativistic Electron Nanoprobes
Here, taking advantage of the high average brightness of our electron source, we demonstrate the generation of ultrafast relativistic electron beams with picometer-scale emittance and their ability to probe nanoscale features on materials with complex ...Nature: 2019-05-21
[url: https://www.nature.com/articles/s42005-019-0154-4?bcmt=1]

Nanoscale sculpturing leads to unusual packing of nanocubes
>From the ancient pyramids to modern buildings, various three-dimensional (3-D) structures have been formed by packing shaped objects together. At the macroscale, the shape of objects is fixed and ...Phys.org: 2019-05-17
[url: https://phys.org/news/2019-05-nanoscale-sculpturing-unusual-nanocubes.html]

New DNA-nanotechnology-based method enhances nucleic acid analysis
(Nanowerk News) Researchers have been using Fluorescence in situ hybridization (FISH) analysis for decades to literally fish for specific DNA and RNA sequences in intact cells and tissues within their vast seas of nucleic acid molecules. Because of its ...Nanowerk: 2019-05-22
[url: https://www.nanowerk.com/nanotechnology-news2/newsid=52858.php]

Producing electricity at estuaries using light and osmosis
Researchers from EPFL&#39;s Laboratory of Nanoscale Biology (LBEN), which is headed by Professor Aleksandra Radenovic at the School of Engineering, have shown that the production of power using ...Phys.org: 2019-05-23
[url: https://phys.org/news/2019-05-electricity-estuaries-osmosis.html]

Light and nanotechnology prevent bacterial infections on medical implants
(Nanowerk News) Invented approximately 50 years ago, surgical medical meshes have become key elements in the recovery procedures of damaged-tissue surgeries, the most common being hernia repair. When implanted within the tissue of the patient, the flexible ...Nanowerk: 2019-05-23
[url: https://www.nanowerk.com/nanotechnology-news2/newsid=52863.php]





Featured Event

Transducers-Eurosensors 2019[1]The 20th International Conference on
Solid-State Sensors, Actuators and Microsystems

MEMS Event Calendar:

Flex Japan 2019 &amp; MEMS &amp; Sensors Forum
[url: http://www1.semi.org/jp/flex-japan-en?utm_campaign=FLEX%20Japan]
2019-05-22 - 2019-05-23
Shinagawa, Tokyo, Japan

Transducers 2019 - Eurosensors XXXlll
[url: https://transducers-eurosensors2019.org/]
2019-06-23 - 2019-06-27
Berlin, Germany

Sensors Expo &amp; Conference 2019
[url: https://www.sensorsexpo.com/register]
2019-06-25 - 2019-06-27
San Jose, CA
The North American event focused on sensors and sensor-integrated systems

SemiCon West - Beyond Smart
[url: http://www.semiconwest.org/]
2019-07-09 - 2019-07-11
Moscone Center - San Franscisco, CA
Our industry - and the world - is moving BEYOND SMART

IEEE MEMS 2020
[url: https://www.mems20.org/]
2020-01-18 - 2020-01-22
Vancouver, Canada
 The 33rd International Conference on Micro Electro Mechanical Systems


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<h1 style="font-size:20px; font-weight:normal; color:#003366; width:590px;            display:block; background-color:#C4CBDA; padding:5px">MEMS technology</h1>

<dl style="width:600px">
<dt style="font-weight:bold; margin-top: 0.5ex"><span style="margin:1px; float:right"><a href="https://www.nature.com/articles/s41378-019-0059-0" target="_new"><img src="https://www.bing.com/th?id=ON.8DE55DBFD083E2C0E2AFA1EC9B7908EE&amp;pid=News" style="border:none" alt="thumbnail"/></a></span><a href="https://www.nature.com/articles/s41378-019-0059-0" target="_new" title="https://www.nature.com/articles/s41378-019-0059-0">Mechanically strengthened graphene-Cu composite with reduced thermal expansion towards interconnect applications</a>
</dt>
<dd style="margin-bottom:0.5ex">High-density integration technologies with copper (Cu) through-silicon via (TSV) have emerged as viable alternatives for achieving the requisite integration densities for the portable electronics and micro-electro-mechanical systems (MEMSs) package.<br /><div style="font-style:italic; font-size:smaller">Nature: 2019-05-19 - MEMS technology</div>
</dd>
<div style="clear:right"></div>

<dt style="font-weight:bold; margin-top: 0.5ex"><span style="margin:1px; float:right"><a href="https://phys.org/news/2019-05-early-disease-extracellular-vesicles.html" target="_new"><img src="https://www.bing.com/th?id=ON.2788FB03B08AE9780C61DE2518A7EEAA&amp;pid=News" style="border:none" alt="thumbnail"/></a></span><a href="https://phys.org/news/2019-05-early-disease-extracellular-vesicles.html" target="_new" title="https://phys.org/news/2019-05-early-disease-extracellular-vesicles.html">Cutting the time on early disease diagnoses with extracellular vesicles</a>
</dt>
<dd style="margin-bottom:0.5ex">The difference is an integrated microfluidics platform developed at Notre Dame that uses extracellular vesicles (EVs) containing microRNAs (miRNAs) as biomarkers for early-stage disease diagnosis.<br /><div style="font-style:italic; font-size:smaller">Phys.org: 2019-05-20 - MEMS technology</div>
</dd>
<div style="clear:right"></div>

<dt style="font-weight:bold; margin-top: 0.5ex"><span style="margin:1px; float:right"><a href="https://www.nature.com/articles/s42004-019-0157-9" target="_new"><img src="https://www.bing.com/th?id=ON.BECA962AE247115EC92C852B7134FDA8&amp;pid=News" style="border:none" alt="thumbnail"/></a></span><a href="https://www.nature.com/articles/s42004-019-0157-9" target="_new" title="https://www.nature.com/articles/s42004-019-0157-9">Measuring ion-pairing and hydration in variable charge supramolecular cages with microwave microfluidics</a>
</dt>
<dd style="margin-bottom:0.5ex">Metal-organic supramolecular cages can act as charged molecular containers that mediate reactions, mimic enzymatic catalysis, and selectively sequester chemicals. The hydration of these cages plays a crucial role in their interactions with other species.<br /><div style="font-style:italic; font-size:smaller">Nature: 2019-05-17 - MEMS technology</div>
</dd>
<div style="clear:right"></div>

<dt style="font-weight:bold; margin-top: 0.5ex"><span style="margin:1px; float:right"><a href="https://www.electronicsweekly.com/news/research-news/mems-detects-thz-radiation-room-temperature-2019-05/" target="_new"><img src="https://www.bing.com/th?id=ON.8EC9AF5ACA9A4489F0974D827A924D83&amp;pid=News" style="border:none" alt="thumbnail"/></a></span><a href="https://www.electronicsweekly.com/news/research-news/mems-detects-thz-radiation-room-temperature-2019-05/" target="_new" title="https://www.electronicsweekly.com/news/research-news/mems-detects-thz-radiation-room-temperature-2019-05/">Mems detects THz radiation at room temperature</a>
</dt>
<dd style="margin-bottom:0.5ex">The University of Tokyo has created a thermo-mechanical micromachine that can sense terahertz electromagnetic radiation, without the need for cryogenic cooling. THz cameras is a possible application. The device is a beam suspended across a gap, coated with ...<br /><div style="font-style:italic; font-size:smaller">Electronics Weekly: 2019-05-16 - MEMS technology</div>
</dd>
<div style="clear:right"></div>

</dl>
<h1 style="font-size:20px; font-weight:normal; color:#003366; width:590px;            display:block; background-color:#C4CBDA; padding:5px">MEMS business</h1>

<dl style="width:600px">
<dt style="font-weight:bold; margin-top: 0.5ex"><a href="https://compoundsemiconductor.net/article/107284/EV_to_show_latest_in_heterogeneous_integration_in_Las_Vegas" target="_new" title="https://compoundsemiconductor.net/article/107284/EV_to_show_latest_in_heterogeneous_integration_in_Las_Vegas">EV To Show Latest In Heterogeneous Integration In Las Vegas</a>
</dt>
<dd style="margin-bottom:0.5ex">Company to present on high-vacuum system which provides direct bonding of 'anything on anything' at IEEE ECTC EV Group (EVG), a supplier of wafer bonding and lithography equipment for MEMS, nanotechnology and compound semiconductors, will be presenting on ...<br /><div style="font-style:italic; font-size:smaller">Compoundsemiconductor.net: 2019-05-21 - MEMS business</div>
</dd>
<div style="clear:right"></div>

<dt style="font-weight:bold; margin-top: 0.5ex"><span style="margin:1px; float:right"><a href="https://www.ecnmag.com/news/2019/05/jasper-display-plessey-demonstrate-gan-silicon-monolithic-microled-bonded-displays" target="_new"><img src="https://www.bing.com/th?id=ON.62987B707074956B4891AF5763F963F5&amp;pid=News" style="border:none" alt="thumbnail"/></a></span><a href="https://www.ecnmag.com/news/2019/05/jasper-display-plessey-demonstrate-gan-silicon-monolithic-microled-bonded-displays" target="_new" title="https://www.ecnmag.com/news/2019/05/jasper-display-plessey-demonstrate-gan-silicon-monolithic-microled-bonded-displays">Jasper Display, Plessey demonstrate GaN-on-Silicon Monolithic microLED Bonded Displays</a>
</dt>
<dd style="margin-bottom:0.5ex">Following a continued partnership with JDC including an extensive capital investment in a complete tool set, enabling successful wafer to wafer bonding. Plessey has succeeded in wafer level bonding of its GaN-on-Silicon monolithic microLED wafers with JDC ...<br /><div style="font-style:italic; font-size:smaller">ecnmag: 2019-05-16 - MEMS business</div>
</dd>
<div style="clear:right"></div>

</dl>
<h1 style="font-size:20px; font-weight:normal; color:#003366; width:590px;            display:block; background-color:#C4CBDA; padding:5px">Nanotechnology</h1>

<dl style="width:600px">
<dt style="font-weight:bold; margin-top: 0.5ex"><span style="margin:1px; float:right"><a href="https://menafn.com/1098559103/Understanding-Nano" target="_new"><img src="https://www.bing.com/th?id=ON.39D94BCDA05568D42F4BD510170E985A&amp;pid=News" style="border:none" alt="thumbnail"/></a></span><a href="https://menafn.com/1098559103/Understanding-Nano" target="_new" title="https://menafn.com/1098559103/Understanding-Nano">Understanding Nano !</a>
</dt>
<dd style="margin-bottom:0.5ex">Scanning probe instruments can't imagine anything as large as luggage, however; they are more useful for measuring structures on length scales from the single atom level to the micro-scale.<br /><div style="font-style:italic; font-size:smaller">MENAFN: 2019-05-23 - Nanotechnology</div>
</dd>
<div style="clear:right"></div>

<dt style="font-weight:bold; margin-top: 0.5ex"><span style="margin:1px; float:right"><a href="https://eandt.theiet.org/content/articles/2019/05/darpa-funds-brain-machine-interface-project-for-controlling-weapons-via-thoughts/" target="_new"><img src="https://www.bing.com/th?id=ON.C16704371C67FB9EBB94241F77876504&amp;pid=News" style="border:none" alt="thumbnail"/></a></span><a href="https://eandt.theiet.org/content/articles/2019/05/darpa-funds-brain-machine-interface-project-for-controlling-weapons-via-thoughts/" target="_new" title="https://eandt.theiet.org/content/articles/2019/05/darpa-funds-brain-machine-interface-project-for-controlling-weapons-via-thoughts/">Darpa funds brain-machine interface project for controlling weapons via thoughts</a>
</dt>
<dd style="margin-bottom:0.5ex">The US Defence Advanced Research Projects Agency (Darpa) has officially funded a programme to develop a brain-to-machine interface – in the form of a headset designed to let military personnel control weapons through brain activity alone. The Next ...<br /><div style="font-style:italic; font-size:smaller">IET: 2019-05-23 - Nanotechnology</div>
</dd>
<div style="clear:right"></div>

<dt style="font-weight:bold; margin-top: 0.5ex"><span style="margin:1px; float:right"><a href="https://www.ecnmag.com/news/2019/05/scientists-dgist-develop-polariton-nano-laser-operating-room-temperature" target="_new"><img src="https://www.bing.com/th?id=ON.1BD6F00D5F8F63A18163447F9F5B3B45&amp;pid=News" style="border:none" alt="thumbnail"/></a></span><a href="https://www.ecnmag.com/news/2019/05/scientists-dgist-develop-polariton-nano-laser-operating-room-temperature" target="_new" title="https://www.ecnmag.com/news/2019/05/scientists-dgist-develop-polariton-nano-laser-operating-room-temperature">Scientists at DGIST Develop Polariton Nano-Laser Operating at Room Temperature</a>
</dt>
<dd style="margin-bottom:0.5ex">A room temperature polariton nano-laser has been demonstrated, providing the crucial path of related research such as polariton physics at the nanoscale and also applications in quantum information systems. The research was published in the journal ...<br /><div style="font-style:italic; font-size:smaller">ecnmag: 2019-05-21 - Nanotechnology</div>
</dd>
<div style="clear:right"></div>

<dt style="font-weight:bold; margin-top: 0.5ex"><span style="margin:1px; float:right"><a href="https://www.nature.com/articles/s42005-019-0154-4?bcmt=1" target="_new"><img src="https://www.bing.com/th?id=ON.B5F607842069FB979510ADD23D8114A1&amp;pid=News" style="border:none" alt="thumbnail"/></a></span><a href="https://www.nature.com/articles/s42005-019-0154-4?bcmt=1" target="_new" title="https://www.nature.com/articles/s42005-019-0154-4?bcmt=1">Ultrafast Relativistic Electron Nanoprobes</a>
</dt>
<dd style="margin-bottom:0.5ex">Here, taking advantage of the high average brightness of our electron source, we demonstrate the generation of ultrafast relativistic electron beams with picometer-scale emittance and their ability to probe nanoscale features on materials with complex ...<br /><div style="font-style:italic; font-size:smaller">Nature: 2019-05-21 - Nanotechnology</div>
</dd>
<div style="clear:right"></div>

<dt style="font-weight:bold; margin-top: 0.5ex"><span style="margin:1px; float:right"><a href="https://phys.org/news/2019-05-nanoscale-sculpturing-unusual-nanocubes.html" target="_new"><img src="https://www.bing.com/th?id=ON.39274DA668A18E5D5D4D44061D8D371E&amp;pid=News" style="border:none" alt="thumbnail"/></a></span><a href="https://phys.org/news/2019-05-nanoscale-sculpturing-unusual-nanocubes.html" target="_new" title="https://phys.org/news/2019-05-nanoscale-sculpturing-unusual-nanocubes.html">Nanoscale sculpturing leads to unusual packing of nanocubes</a>
</dt>
<dd style="margin-bottom:0.5ex">From the ancient pyramids to modern buildings, various three-dimensional (3-D) structures have been formed by packing shaped objects together. At the macroscale, the shape of objects is fixed and ...<br /><div style="font-style:italic; font-size:smaller">Phys.org: 2019-05-17 - Nanotechnology</div>
</dd>
<div style="clear:right"></div>

<dt style="font-weight:bold; margin-top: 0.5ex"><span style="margin:1px; float:right"><a href="https://www.nanowerk.com/nanotechnology-news2/newsid=52858.php" target="_new"><img src="https://www.bing.com/th?id=ON.E9A29859320AB09BFA4A833B71F7AD95&amp;pid=News" style="border:none" alt="thumbnail"/></a></span><a href="https://www.nanowerk.com/nanotechnology-news2/newsid=52858.php" target="_new" title="https://www.nanowerk.com/nanotechnology-news2/newsid=52858.php">New DNA-nanotechnology-based method enhances nucleic acid analysis</a>
</dt>
<dd style="margin-bottom:0.5ex">(Nanowerk News) Researchers have been using Fluorescence in situ hybridization (FISH) analysis for decades to literally fish for specific DNA and RNA sequences in intact cells and tissues within their vast seas of nucleic acid molecules. Because of its ...<br /><div style="font-style:italic; font-size:smaller">Nanowerk: 2019-05-22 - Nanotechnology</div>
</dd>
<div style="clear:right"></div>

<dt style="font-weight:bold; margin-top: 0.5ex"><span style="margin:1px; float:right"><a href="https://phys.org/news/2019-05-electricity-estuaries-osmosis.html" target="_new"><img src="https://www.bing.com/th?id=ON.58215EC581F57B68CC21213A2432261D&amp;pid=News" style="border:none" alt="thumbnail"/></a></span><a href="https://phys.org/news/2019-05-electricity-estuaries-osmosis.html" target="_new" title="https://phys.org/news/2019-05-electricity-estuaries-osmosis.html">Producing electricity at estuaries using light and osmosis</a>
</dt>
<dd style="margin-bottom:0.5ex">Researchers from EPFL's Laboratory of Nanoscale Biology (LBEN), which is headed by Professor Aleksandra Radenovic at the School of Engineering, have shown that the production of power using ...<br /><div style="font-style:italic; font-size:smaller">Phys.org: 2019-05-23 - Nanotechnology</div>
</dd>
<div style="clear:right"></div>

<dt style="font-weight:bold; margin-top: 0.5ex"><span style="margin:1px; float:right"><a href="https://www.nanowerk.com/nanotechnology-news2/newsid=52863.php" target="_new"><img src="https://www.bing.com/th?id=ON.C3CB0CCA34089C211FFA0BA5D7F34DFF&amp;pid=News" style="border:none" alt="thumbnail"/></a></span><a href="https://www.nanowerk.com/nanotechnology-news2/newsid=52863.php" target="_new" title="https://www.nanowerk.com/nanotechnology-news2/newsid=52863.php">Light and nanotechnology prevent bacterial infections on medical implants</a>
</dt>
<dd style="margin-bottom:0.5ex">(Nanowerk News) Invented approximately 50 years ago, surgical medical meshes have become key elements in the recovery procedures of damaged-tissue surgeries, the most common being hernia repair. When implanted within the tissue of the patient, the flexible ...<br /><div style="font-style:italic; font-size:smaller">Nanowerk: 2019-05-23 - Nanotechnology</div>
</dd>
<div style="clear:right"></div>

</dl>
<h1 style="font-size:20px; font-weight:normal; color:#003366; width:590px;            display:block; background-color:#C4CBDA; padding:5px">Featured Event</h1>
<a href="https://transducers-eurosensors2019.org/" target="_new"><div style="width:600px"><img src="http://www.memsnet.org/events/1588/file/c4687e97648d/TRANS19-600x125-WB1.gif" alt="Transducers-Eurosensors 2019" style="border:none" /></div></a><div style="width:600px"><div style="font-size:smaller">The 20th International Conference on Solid-State Sensors, Actuators and Microsystems </div><div style="clear:both"></div></div>
<h1 style="font-size:20px; font-weight:normal; color:#003366; width:590px;            display:block; background-color:#C4CBDA; padding:5px">Event Calendar</h1>
<div><table style="border:none; width:600px">
<tr><td><dl style="width:460px">
<dt><b><a href="http://www1.semi.org/jp/flex-japan-en?utm_campaign=FLEX%20Japan">Flex Japan 2019 &amp; MEMS &amp; Sensors Forum</a></b></dt>
<dd>2019-05-22 - 2019-05-23<br />Shinagawa, Tokyo, Japan<br />
</dd></dl>
</td><td><a href="http://www1.semi.org/jp/flex-japan-en?utm_campaign=FLEX%20Japan" target="_new" title="Flex Japan 2019 &amp; MEMS &amp; Sensors Forum"><img src="http://www.memsnet.org/events/1596/file/210b6bc72391/FLEX_125x65.png" width="125" height="65" alt="Flex Japan 2019 &amp; MEMS &amp; Sensors Forum" class="sponsor" style="padding-left:1ex; border:none"/></a>
</td></tr>
<tr><td><dl style="width:460px">
<dt><b><a href="https://transducers-eurosensors2019.org/">Transducers 2019 - Eurosensors XXXlll</a></b></dt>
<dd>2019-06-23 - 2019-06-27<br />Berlin, Germany<br />
</dd></dl>
</td><td><a href="https://transducers-eurosensors2019.org/" target="_new" title="Transducers 2019 - Eurosensors XXXlll"><img src="http://www.memsnet.org/events/1588/file/ec8ceaa3d36e/transducers-eurosensors-2019-125x60.png" width="125" height="65" alt="Transducers 2019 - Eurosensors XXXlll" class="sponsor" style="padding-left:1ex; border:none"/></a>
</td></tr>
<tr><td><dl style="width:460px">
<dt><b><a href="https://www.sensorsexpo.com/register">Sensors Expo &amp; Conference 2019</a></b></dt>
<dd>2019-06-25 - 2019-06-27<br />San Jose, CA<br />The North American event focused on sensors and sensor-integrated systems<br />
</dd></dl>
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<dd>2019-07-09 - 2019-07-11<br />Moscone Center - San Franscisco, CA<br />Our industry - and the world - is moving BEYOND SMART<br />
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<dt><b><a href="https://www.mems20.org/">IEEE MEMS 2020</a></b></dt>
<dd>2020-01-18 - 2020-01-22<br />Vancouver, Canada<br /> The 33rd International Conference on Micro Electro Mechanical Systems<br />
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